Mechanical and electrical properties of Al2O3 thin films on metals, ceramics and resins prepared by aerosol deposition method

Ceramic Engineering and Science Proceedings

Volumn 24, Issue 4, 2003, Pages 121-125

  Tsujimichi, Kazuya ^a   Mori, Katsuhiko ^a   Yoshida, Atsushi ^a   Iwasawa, Junichi ^a   Hatono, Hironori ^a   Kiyohara, Masakatsu ^a   Lebedev, Maxim ^b   Akedo, Jun ^b  

^a TOTO LTD   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; ALUMINA; CERAMIC MATERIALS; COATING TECHNIQUES; DEPOSITION; ELECTRIC BREAKDOWN; ELECTRIC POTENTIAL; ELECTROSTATICS; GLASS; HEATING; NOZZLES; RESINS; VICKERS HARDNESS TESTING;

FLOW VELOCITY;

THIN FILMS;

EID: 0344495954     PISSN: 01966219     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. T. Ide, Y. Mori, I. Konta, N. Ikawa and H. Yagi, "A film formation method using hypervelocity microparticle impact by electrostatic acceleration", J. Prec. Eng. Jpn., 57 [5], 143-148 (1991).
2. N. P. Rao, N. Tyamiak, J.Blum, A. Neuman, H. J. Lee, S. L. Girshick, P. H. McMurry and J. Heberlein, "Hypersonic plasma particle deposition of nanostructured silicon and silicon carbide", J. Aerosol Sci., 29 707-720 (1998).
3. J. Akedo and M. Lebedev, "Influence of carrier gas condition on electrical and optical properties of Pb(Zr, Ti)O3 thin films prepared by aerosol deposition method", Jpn. J. Appl. Phys., 40 5528-5532 (2001).
4. M. Lebedev, J. Akedo, K. Mori and T. Eiju, "Simple self-selective method of velocity measurement for particles in impact-based deposition", J. Vac. Sci. Technol. A, 18 [2] 563-556 (2000).
5. G. Hoetzch, O. Zywitzki and H. Sahm, "Structure, properties and application for PVD Al2O3 layers - A comparison of deposition technologies", Society of Vacuum Coaters 40th Annual 1Technical Conference Proceedings, 77-85 (1997).