Synthesis and characterization of novel low-k polyimides from aromatic dianhydrides and aromatic diamine containing phenylene ether and perfluorobiphenyl units

Polymer Journal

Volumn 38, Issue 1, 2006, Pages 79-84

  Watanabe, Yasufumi ^a   Shibasaki, Yuji ^a   Ando, Shinji ^a   Ueda, Mitsuru ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Dielectric Constant; Phenylene Ether; Polyimides; Refractive Index; Thermal Properties

Indexed keywords

HEAT TREATMENT; PERMITTIVITY; POLYCONDENSATION; REFRACTIVE INDEX; SYNTHESIS (CHEMICAL); THERMODYNAMIC STABILITY;

AROMATIC DIANHYDRIDES; PHENYLENE ETHER; THERMAL PROPERTIES;

ETHERS;

EID: 33644603951     PISSN: 00323896     EISSN: None     Source Type: Journal    
DOI: 10.1295/polymj.38.79     Document Type: Article

References (12)

1. "Polyimides Fundamentals and Applications," M. K. Ghosh, K. L. Mittal, and K. L., Ed., Marcel Decker, New York, 1996.
2. G. Maier, Prog. Polym. Sci., 26, 3 (2001).
3. K. Goto, M. Kakuta, Y. Inoue, and M. Matsubara, J. Photopolym. Sci. Technol., 13, 313 (2000).
4. K. Goto, Y. Inoue, and M. Matsubara, J. Photopolym. Sci. Technol., 14, 33 (2001).
5. R. H. Vora, P. S. G. Krishnan, S. H. Goh, and T. S. Chung, Adv. Funct. Mater., 11, 361 (2001).
6. Y. Watanabe, Y. Shibasaki, S. Ando, and M. Ueda, Polymer, 46, 5903 (2005).
7. K. Goto, in "Polyimides," Y. Imai and R. Yokota, Eds., N.T.S, Tokyo, 2002, p 270.
8. C.-Y. Yang, H.-C. Chian, and Y.-Y. Su, Polym. J., 36, 979 (2004).
9. D. Boese, H. Lee, D. Y. Yoon, J. D. Swallen, and J. F. Rabolt, J. Polym. Sci., Part B: Polym. Phys., 30, 1321 (1992).
10. S. Ando, T. Matsuura, and S. Sasaki, in "Polymers for Microelectronics: Resists and Dielectrics," L. F. Thompson, C. G. Willson, and S. Tagawa, Ed., American Chemical Society, Washington, D.C., 1994, p 304.
11. T. Matsumoto, Macromolecules, 32, 4933 (1999).
12. Y. Watanabe, Y. Sakai, Y. Shibasaki, S. Ando, M. Ueda, Y. Oishi, and K. Mori, Macromolecules, 35, 2277 (2002).