High-speed deposition of new low-refractive-index dielectric film "SiOC" for rewritable HD DVD media

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 2 B, 2006, Pages 1447-1451

  Nakai, Tsukasa ^a   Yusu, Keiichiro ^a   Satoh, Yasuhiro ^a   Ashida, Sumio ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Blue violet laser; Fast deposition; HD DVD; Low refractive index material; Low to high signal polarity; Optical disc; Phase change optical recording; Rewritable; SiOC

Indexed keywords

OPTICAL RECORDING; REFRACTIVE INDEX; SILICA; SPUTTERING; THIN FILMS; VIDEODISKS;

BLUE-VIOLET LASER; FAST DEPOSITION; HD DVD; SIOC;

DIELECTRIC FILMS;

EID: 33644553803     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.45.1447     Document Type: Article

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