SCOPUS 정보 검색 플랫폼

Volumn 26, Issue 1, 2006, Pages 231-234

Understanding and preventing beam damage effects in partially processed high-k gate stacks

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33644512053 PISSN: 17426588 EISSN: 17426596 Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/26/1/055 Document Type: Conference Paper

Times cited : (2)

References (5)

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- ITRS 2001 International Technology Roadmap for Semiconductors (San Jose, Semiconductor Research Association) http://www.itrs.net/Common/2004Update/ 2004Update.htm
- (2001) International Technology Roadmap for Semiconductors

2
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- Craven A J, MacKenzie M, McComb D W and Hamilton D A 2003 Inst. Phys. Conf. Ser. vol 84 p 4523-25
- (2003) , vol.84 , pp. 4523-4525
- Craven, A.J.¹ MacKenzie, M.² McComb, D.W.³ Hamilton, D.A.⁴

3
- 10644265977
- Lu J, Aarik J, Sundqvist J, Kukli K, Harsta A and Carlsson J-O 2005 J. Cryst. Growth 273 510-514
- (2005) J. Cryst. Growth , vol.273 , Issue.3-4 , pp. 510-514
- Lu, J.¹ Aarik, J.² Sundqvist, J.³ Kukli, K.⁴ Harsta, A.⁵ Carlsson, J.-O.⁶

4
- 14544299203
- Foran B, Barnett J, Lysaght P S, Agustin M P and Stemmer S 2005 J. Elec. Spec. Related Phenomena 143 149-158
- (2005) J. Elec. Spec. Related Phenomena , vol.143 , pp. 149-158
- Foran, B.¹ Barnett, J.² Lysaght, P.S.³ Agustin, M.P.⁴ Stemmer, S.⁵

5
- 19944412496
- Craven A J, MacKenzie M, McComb D W and Docherty F T 2005 Microelec. Eng. 80 90-97
- (2005) Microelec. Eng. , vol.80 , pp. 90-97
- Craven, A.J.¹ MacKenzie, M.² McComb, D.W.³ Docherty, F.T.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.