Single-wavelength monitoring method for optical thin-film coating

Optical Engineering

Volumn 43, Issue 6, 2004, Pages 1439-1444

  Zhang, Cheng ^a   Wang, Yongtian ^a   Lu, Weiqiang ^a  

^a BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MONITORING; OPTICAL FILMS; OPTICAL FILTERS; REFRACTIVE INDEX; THICKNESS CONTROL; THIN FILMS;

OPTICAL THICKNESS MONITORING; OPTICAL THIN FILMS; QUARTER WAVE OPTICAL THICKNESS;

OPTICAL COATINGS;

EID: 3342979801     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1719027     Document Type: Article

References (9)

1. H. K. Pulker, "Film thickness," Chap. 7 in Coating on Glass, pp. 297-304, Elsevier, New York (1984).
2. H. K. Pulker, "Film thickness," Chap. 7 in Coating on Glass, pp. 306-308, Elsevier, New York (1984).
3. W. G. Sainty and D. W. Sainty, "Multiwavelength monitoring of thin-film growth using a fiber spectrometer," Proc. SPIE 4094, 31-37 (2000).
4. H. A. Macleod, "Monitoring of optical coatings," Appl. Opt. 20, 82-89 (1981).
5. R. R. Willey, Practical Design and Production of Optical Thin Films, p. 223, Marcel Dekker, Inc., New York (1996).
6. H. A. Macleod, "Layer uniformity and thickness monitoring," Chap. 10 in Thin-Film Optical Filters, pp. 427-429, Adam Hilger Ltd, Bristol (1986).
7. K. H. Behrndt and D. W. Doughty, "Fabrication of multiplayer dielectric films," J. Vac. Sci. Technol. 3, 264-272 (1966).
8. H. A. Macleod, "Layer uniformity and thickness monitoring," Chap. 10 in Thin-Film Optical Filters, pp. 429-430, Adam Hilger Ltd, Bristol (1986).
9. H. A. Macleod, "Basic theory," Chap. 2 in Thin-Film Optical Filters, pp. 62-66, Adam Hilger Ltd, Bristol (1986).