Multiwavelength monitoring of thin film growth using a fibre spectrometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4094, Issue 1, 2000, Pages 31-37

  Sainty, Wayne G ^a   Sainty, David W ^b  

^a Saintech Pty Ltd   (Australia)

^b Ifix Computer Solution   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; MULTILAYERS; SPECTROMETERS; THIN FILMS;

FIBER SPECTROMETERS; LAMP EMISSION SPECTRUM; MULTIWAVELENGTH MONITORING;

OPTICAL FILMS;

EID: 0034538792     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.404756     Document Type: Article

References (0)