Oxide and Fluoride coatings for the excimer wavelength 193nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5963, Issue , 2005, Pages

  Götzelmann, Rainer ^a   Hagedorn, Harro ^a   Zöller, Alfons ^a   Kobiak, Alexej ^a   Klug, Werner ^a  

^a Leybold Optics GmbH   (Germany)

Author keywords

Alumina; DUV Coatings; Excimer laser; Fluorides; LAD; Silica

Indexed keywords

ABSORPTION; OPTICAL PROPERTIES; OPTIMIZATION; THIN FILMS; ULTRAVIOLET RADIATION;

FLUORIDES; LAD; MULTILAYER STACKS;

EXCIMER LASERS;

EID: 33144486899     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.625152     Document Type: Conference Paper

References (5)

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3. A. Zöller, "Temperature stability of optical coatings produced by plasma and ion assisted evaporation processes", OSA tech. digest series vol. 9 pp 2-4 (1998)
4. R. Thielsch, J. Heber, S. Jakobs, N. Kaiser, A. Duparre, J. Ullmann, "Optical, structural and mechanical properties of lanthnide trifluoride thin film materials for use in the DUV-spectral region" Optical Interference Coatings OSA technical digest series Vol.9 Tucson 1998 p.116
5. 3 films for use in UV-optical coatings", SPIE Vol 3141 (1997)