Nonlinear response of parametrically-excited MEMS

Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005

Volumn 1 A, Issue , 2005, Pages 453-461

  Rhoads, Jeffrey F ^a   Moehlis, Jeff ^b   Shaw, Steven W ^a   Demartini, Barry E ^b   Turner, Kimberly L ^b   Zhang, Wenhua ^b,c  

^a Michigan State University   (United States)

^b University of California   (United States)

^c HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC EXCITATION; EQUATIONS OF MOTION; NONLINEAR CONTROL SYSTEMS; PARAMETER ESTIMATION;

ELECTROSTATIC FORCES; NONLINEAR RESPONSE; PARAMETRIC EXCITATION;

MICROELECTROMECHANICAL DEVICES;

EID: 33144471309     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/detc2005-84603     Document Type: Conference Paper

References (11)

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2. Turner, K. L., 1999. "Applications and analysis of parametric resonance in microelectromechanical systems". PhD Thesis, Cornell University.
3. Zhang, W., Baskaran, R., and Turner, K. L., 2002. "Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor". Sensors and Actuators A: Physical, 102(1-2), pp. 139-150.
4. Turner, K. L., and Zhang, W., 2001. "Design and analysis of a dynamic MEM chemical sensor". In Proceedings of the 2001 American Control Conference, Vol. 1212, pp. 1214-1218.
5. Zhang, W., Baskaran, R., and Turner, K. L., 2002. "Nonlinear dynamics analysis of a parametrically resonant MEMS sensor". In Proceedings of the 2002 SEM Annual Conference and Exposition on Experimental and Applied Mechanics.
6. Zhang, W., and Turner, K., 2004. "Parametrically resonant mass sensor". In Proceedings of the 2004 Workshop on Solid-State Sensors and Actuators, to be published.
7. Shaw, S. W., Turner, K. L., Rhoads, J. F., and Baskaran, R., 2003. "Parametrically excited MEMS-based filters". In Proceedings of the IUTAM Symposium on Chaotic Dynamics and Control of Systems and Processes in Mechanics.
8. Rhoads, J. F., Shaw, S. W., Turner, K. L., Moehlis, J., DeMartini, B. E., and Zhang, W., 2005. "Nonlinear parametric resonance in electrostatically-excited microelectromechanical systems". In preparation for the Journal of Sound and Vibration.
9. Mond, M., Cederbaum, G., Khan, P. B., and Zarmi, Y., 1993. "Stability analyisis of the non-linear Mathieu equation". Journal of Sound and Vibration, 167(1), pp. 77-89.
10. Younesian, D., Esmailzadeh, E., and Sedaghati, R., 2005. "Existence of periodic solutions for the generalized form of Mathieu equation". Nonlinear Dynamics, 39(4), pp. 335-348.
11. Abraham, G. T., and Chatterjee, A., 2003. "Approximate asymptotics for a nonlinear Mathieu equation using harmonic balance based averaging". Nonlinear Dynamics, 31, pp. 347-365.