Correlation between the optical performance of TiO2-Ag-TiO2 multilayers and the interface roughness between the layers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5963, Issue , 2005, Pages

  Von Blanckenhagen, Bernhard ^a   Tonova, Diana ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

Absorption; Grazing incidence X ray reflectometry; Metal dielectric multilayer

Indexed keywords

COATINGS; DIELECTRIC MATERIALS; LIGHT POLARIZATION; TITANIUM DIOXIDE; X RAY ANALYSIS;

GRAZING INCIDENCE X-RAY REFLECTOMETRY; METAL DIELECTRIC MULTILAYER;

MULTILAYERS;

EID: 33144467821     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.625193     Document Type: Conference Paper

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