Microstructure related properties at 193nm of MgF2and GdF3films deposited by resistive heating boat

Optics InfoBase Conference Papers

Volumn , Issue , 2004, Pages

  Liu, Ming Chung ^a   Lee, Cheng Chung ^a   Kaneko, Masaaki ^b   Nakahira, Kazuhide ^b   Takano, Yuuichi ^b  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b Tochigi Nikon   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BOATS; COATINGS;

MULTI-LAYER-COATING; OPTICAL CHARACTERISTICS; PROPERTY; RESISTIVE HEATING; SINGLE LAYER;

MICROSTRUCTURE;

EID: 33144459929     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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2. Y. Uchida, R. Kato, E. Matsui, "Optical Properties of Some Solids in the Vacuum Ultraviolet", J. Quant. Spectrosc. Ra., 2, 589-598 (1962).
3. Flexus, Manual, "Thin Film Stress Measurement System TENCOR FLX 3220".
4. Y. J. Jen and C. C. Lee, "The Reflection and Transmission Phenomena of Waves Propagating between Isotropic Medium and Arbitrary Oriented Anisotropic Medium", Opt. Lett., 190-192 (2001).
5. 3Films Grown by Molecular Beam Deposition on CaF2(111) Substrates", Thin Solid Films, 280, 5-15 (1996).