Pulsed laser deposition of metal oxide films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3343, Issue , 1998, Pages 872-876

  Jia, Quanxi ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Conductive oxides; Pulsed laser deposition; RuO2; SrRuO3

Indexed keywords

CONDUCTIVE FILMS; DEPOSITION; ELECTRIC PROPERTIES; LASER ABLATION; LASER APPLICATIONS; LASERS; METALLIC COMPOUNDS; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER DEPOSITION; RUTHENIUM ALLOYS; RUTHENIUM COMPOUNDS; THIN FILMS;

CONDUCTIVE OXIDES; DEPOSITION PROCESS; HIGH QUALITIES; METAL-OXIDE FILMS; PROCESSING CONDITIONS; ROOM-TEMPERATURE RESISTIVITIES; RUO2; SRRUO3; STRUCTURAL AND ELECTRICAL PROPERTIES; SUBSTRATE TEMPERATURES; UNIQUE FEATURES; VAPOR-DEPOSITION TECHNIQUES;

OXIDE FILMS;

EID: 32844473637     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321615     Document Type: Conference Paper

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