Study of the kinetics of the copper cleaning by X-ray reflectometry

ECS Transactions

Volumn 1, Issue 3, 2006, Pages 365-372

  Rebiscoul D ^a   Broussous, L ^b   Louis, D ^a   Passemard, G ^b  

^a CEA GRENOBLE   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; INORGANIC ACIDS; MORPHOLOGY; OPTICAL INTERCONNECTS; REFLECTION; REFLECTOMETERS;

ELECTRONIC DENSITY PROFILE; X-RAY REFLECTIVITY CURVES;

X RAYS;

EID: 32844461729     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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3. J. Chen, S. Lin, Wen-Ta Tsai, App. Surf. Sc., 233 (1-4), 80-90 (2004).
4. A. van der Lee, Sol. State Sci., 2, 257 (2000).
5. Ober, Firefe4c_6: raymond.ober@college-de-france.fr
6. I.G.Parrat Phys.Rev. 95, 359 (1954).
7. S.Murarka, I. Vemer, R. Gutmann, Copper-Fund, mech. for Microelec. App. (.Wiley &sons ed.) 2000.