SIMS analysis of residual gas elements with a Cameca IMS-6f ion microprobe

Applied Surface Science

Volumn 252, Issue 10, 2006, Pages 3406-3412

  Kudriavtsev, Yu ^a   Villegas, A ^a   Godines, A ^a   Asomoza, R ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

Residual atmosphere; Silicon; SIMS

Indexed keywords

MONOLAYERS; OXYGEN; PROBES; SECONDARY ION MASS SPECTROMETRY; SILICON;

RESIDUAL ATMOSPHERE; RESIDUAL GAS ELEMENTS (RGE);

RESIDUAL FUELS;

EID: 32644432633     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.05.064     Document Type: Article

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