Greatly enhanced detection sensitivity for carbon, nitrogen, and oxygen in silicon by secondary-ion-mass spectrometry

Applied Physics Letters

Volumn 79, Issue 4, 2001, Pages 497-499

  Gnaser, Hubert ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035939265     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1388876     Document Type: Article

References (13)

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11. H. Gnaser, Low-Energy Ion Irradiation of Solid Surfaces (Springer, Berlin, 1999).
12. H. Gnaser, in Secondary Ion Mass Spectrometry SIMS XII, edited by A. Benninghoven, P. Bertrand, H. N. Migeon, and H. W. Werner (Elsevier, Amsterdam, 2000), p. 413.
13. R. S. Hockett, C. A. Evans, and P. K. Chu, in Secondary Ion Mass Spectrometry SIMS VI, edited by A. Benninghoven, A. M. Huber, and H. W. Werner (Wiley, Chichester, 1988), p. 441.