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Volumn 41, Issue 11 B, 2002, Pages 7149-7152
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Measurement technique for mechanical vibration using a thickness-mode piezoelectric transducer with two comb-shaped electrodes
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Author keywords
Comb shaped electrodes; Interference; Mechanical sensing; Mechanical vibration
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Indexed keywords
CERAMIC PRODUCTS;
ELECTRODES;
LASER BEAMS;
MEASUREMENT THEORY;
ULTRASONICS;
VIBRATIONS (MECHANICAL);
COMB-SHAPED ELECTRODES;
INTERFERENCE;
MECHANICAL SENSING;
MECHANICAL VIBRATION;
PIEZOELECTRIC TRANSDUCERS;
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EID: 32444434512
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/JJAP.41.7149 Document Type: Article |
Times cited : (1)
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References (19)
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