Study of ion beam induced epitaxial crystallization of SrTiO3

Journal of Applied Physics

Volumn 87, Issue 7, 2000, Pages 3450-3456

  Oyoshi, K ^a   Hishita, S ^a   Haneda, H ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3242862809     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372365     Document Type: Article

References (22)

1. For a review, see, F. Priolo and E. Rimini, Mater. Sci. Rep. 5, 319 (1990).
2. G. L. Olson and J. A. Roth, Mater. Sci. Rep. 3, 1 (1988).
3. J. Linnros, B. Svensson, and G. Holmen, Phys. Rev. B 30, 3629 (1984).
4. K. A. Jackson, J. Mater. Res. 3, 1218 (1988).
5. V. Heera, Phys. Status Solidi A 114, 599 (1989).
6. T. K. Chaki, Philos. Mag. Lett. 59, 223 (1989).
7. T. K. Chaki, Phys. Status Solidi A 42, 153 (1994).
8. G. Carter and M. J. Nobes, J. Mater. Res. 6, 2103 (1991).
9. V. Heera, R. Koegler, W. Skorupa, and R. Groetzscel, Nucl. Instrum. Methods Phys. Res. B 80/81, 538 (1993).
10. J. Linnros, B. Svenson, and G. Holmen, Phys. Rev. B 30, 3629 (1984).
11. J. Linnros and G. Holmen, J. Appl. Phys. 59, 1513 (1986).
12. N. P. Stepina, G. A. Kachurin, V. P. Popov, and S. I. Romanov, Phys. Status Solidi A 141, 305 (1994).
13. A. F. Viatkin, A. V. Buravlev, and A. P. Zuev, Nucl. Instrum. Methods Phys. Res. B 59/60, 431 (1991).
14. V. Heera, T. Henkel, R. Koegler, and W. Skorupa, Phys. Rev. B 52, 15776 (1995).
15. K. Oyoshi, S. Hishita, S. Suehara, M. Komatsu, T. Suzuki, and H. Haneda, Proceedings of the 12th International Conference on Ion Implantation Technology (1998), in press.
16. J. Rankin, J. C. McCallum, and L. A. Boatner, J. Mater. Res. 7, 717 (1992).
17. See, J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
18. G. Lulli and P. G. Merli, Phys. Rev. B 47, 14023 (1993).
19. M. Lannoo and J. Bourgoin, Point Defects in Semiconductors (Springer, Heidelberg, 1981), Chap 7, pp. 232-237.
20. J. Nakata, J. Appl. Phys. 79, 682 (1996).
21. A. Kinomura, A. Chayahara, Y. Horino, Y. Mokuno, and K. Fujii, Nucl. Instrum. Methods Phys. Res. B 106, 277 (1995).
22. A. Kinomura, J. S. Williams, and K. Fujii, Phys. Rev. B 59, 15214 (1999).