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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 5 B, 2004, Pages 2857-2861

Leveling viscous fluids using ultrasonic waves

(4) Ampo, Keisuke a Nakamura, Kentaro a Ueha, Sadayuki b Tanaka, Shinobu b

Author keywords

Leveling method; Liquid crystal display; Photoresist; Slit nozzle; Spin coat method; Spinless; Standing wave; Traveling wave; Ultrasonic waves; Viscous fluids

Indexed keywords

IRRADIATION; LIQUID CRYSTAL DISPLAYS; NOZZLES; PHOTORESISTS; RADIATION EFFECTS; SPIN COATING; SURFACE PHENOMENA; THICKNESS MEASUREMENT; VISCOUS FLOW;

LEVELLING METHOD; SLIT NOZZLE; SPIN-COAT METHOD; SPINLESS; STANDING WAVES; TRAVELING WAVES;

ULTRASONIC WAVES;

EID: 3242804405 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.2857 Document Type: Conference Paper

Times cited : (4)

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