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Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2001, Pages 513-520

Recent development of ultrasonic actuators

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC FIELD MEASUREMENT; ACOUSTIC WAVE EFFECTS; ACTUATORS; LIQUIDS; PISTONS; PLATE METAL; POLYSILICON; THIN FILMS; UNDERWATER ACOUSTICS; VIBRATIONS (MECHANICAL);

ACOUSTIC ATTRACTIVE FORCE; NEAR FIELD ACOUSTIC LEVITATION; NON CONTACT TRANSPORTATION; ULTRASONIC ACTUATORS;

ULTRASONIC DEVICES;

EID: 0035730499 PISSN: 10510117 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (8)

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