Sensitivity improvement of integrated thermal anemometers obtained by jet flow impingement

Sensors and Actuators, A: Physical

Volumn 113, Issue 3, 2004, Pages 301-306

  Bruschi, Paolo ^a   Navarrini, Dino ^a   Piotto, Massimo ^b   Raffa, Giuseppe ^a  

^a Dipartimento di Ingegneria dell'Informazione   (Italy)

^b CNR   (Italy)

Author keywords

Hotplate; Integrated sensors; Thermal flow sensor

Indexed keywords

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; JETS; MATHEMATICAL MODELS; MICROMACHINING; ORIFICES; POLYSILICON; THERMAL INSULATION; THERMISTORS; THERMOPILES;

HOTPLATES; INTEGRATED SENSORS; LUMPED ELEMENT ANALYSIS; THERMAL FLOW SENSORS;

ANEMOMETERS;

EID: 3242712065     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.01.051     Document Type: Article

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