Properties of barium ferrite sputtered films

Sensors and Actuators, A: Physical

Volumn 113, Issue 3, 2004, Pages 382-386

  Capraro, Stephane ^a   Le Berre, Martine ^b   Chatelon, Jean Pierre ^a   Joisten, Hélène ^c   Mery, Emeline ^b   Bayard, Bernard ^a   Rousseau, Jean Jacques ^a   Barbier, Daniel ^b  

^a UNIVERSITÉ JEAN MONNET   (France)

^b INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^c CEA LETI   (France)

Author keywords

Barium hexaferrite; Crystallography; Magnetic properties; Morphology; Residual stress

Indexed keywords

BARIUM COMPOUNDS; CRYSTALLIZATION; CURVE FITTING; FERRITES; MAGNETIZATION; MAGNETOMETERS; MICROWAVE DEVICES; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILICON; SUBSTRATES;

BARIUM HEXAFERRITES; GYRORESONANCE FREQUENCY; MICROWAVE RANGE; VIBRATING SAMPLE MAGNETOMETER (VSM);

MAGNETIC FILMS;

EID: 3242691355     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.01.016     Document Type: Article

References (20)

1. Matsuoka M., Naoe Y., Hoshi Ba-ferrite thin-film disk for perpendicular magnetic recording. J. Appl. Phys. 57:1985;4040-4042.
2. Yuan M.S., Glass H.L., Adkins L.R. Epitaxial barium hexaferrite on sapphire by sputter deposition. Appl. Phys. Lett. 53:1988;340-341.
3. Lacroix E., Gerard P., Marest G., Dupuy M. Substrate effects on the crystalline orientation of barium hexaferrite films. J. Appl. Phys. 69:1991;4770-4772.
4. Morisako A., Liu X., Matsumoto M., Naoe M. The effect of underlayer for Ba-ferrite sputtered films on c-axis orientation. J. Appl. Phys. 81:1997;4374-4376.
5. Sui X., Kryder M.H. Magnetic easy axis randomly in-plane oriented barium hexaferrite thin film media. Appl. Phys. Lett. 63:1993;1582-1584.
6. Wee A.T.A., Wang J.P., Huan A.C.H., Tan L.P., Gopalakrishnan R., Tan K.L. Underlayer and substrate effects in RF-magnetron sputtered barium ferrite thin films media. IEEE Trans. Magn. 33:1997;2986-2988.
7. Li J., Sinclair R., Rosenblum S.S., Hayashi H. As-deposited crystalline barium ferrite thin film media for longitudinal recording. J. Magn. Magn. Mater. 153:1996;246-254.
8. Sui X., Scherge M., Kryder M.H., Snyder J.E., Harris V.G., Koon N.C. Barium ferrite thin film recording media. J. Magn. Magn. Mater. 155:1996;132-139.
9. Lisfi A., Lodder J.C., de Haan P., Smithers M.A., Roesthuis F.J.G. Barium ferrite films grown by laser ablation. IEEE Trans. Magn. 34:1998;1654-1656.
10. Huang F., Wolfgang J.J., Le T.M., Lambeth D.N., Stancil D.D. Oxygen pressure dependence of laser deposited barium ferrite films on LLC (1 1 1). IEEE Trans. Magn. 31:1995;3826-3828.
11. 3 thin films. J. Appl. Phys. 69:1991;767-772.
12. 3 ferroelectric thin films. Appl. Phys. Lett. 59:1991;3547-3549.
13. Bayard B., Chatelon J.P., Le Berre M., Joisten H., Rousseau J.J., Barbier D. The effects of deposition and annealing conditions on crystallographic properties of sputtered barium ferrite thick films. Sens. Actuators. 99:2002;207-212.
14. Zhuang Z., Bian B., Rao M., White R.M., Laughlin D.E. Effects of stoichiometry on the magnetic and structural properties of perpendicular barium ferrite thin film media. IEEE Trans. Magn. 36:2000;2405-2407.
15. Blech I., Bobles S. Mapping stress to evaluate film uniformity. Solid State Technol. 37:1994;75-77.
16. Kamins T.I. Design properties of polycrystalline silicon. Sens. Actuators A. 23:1990;817-824.
17. Adamczewska J., Bubzynski J. Stress in chemically vapour-deposited silicon films. Thin Solid Films. 113:1984;271-285.
18. Pankhurst Q.A. Anisotropy field measurement in barium ferrite powders by applied field Mossbauer spectroscopy. J. Phys. Condens. Matter. 3:1991;1323-1335.
19. Capraro S., Chatelon J.P., Joisten H., Le Berre M., Bayard B., Barbier D., Rousseau J.J. Magnetic properties of sputtered barium ferrite thick films. J. Appl. Phys. 93:2003;9898-9901.
20. B. Bayard, Ph.D. thesis, University of Saint Etienne, France, 2000.