The effects of deposition and annealing conditions on crystallographic properties of sputtered barium ferrite thick films

Sensors and Actuators, A: Physical

Volumn 99, Issue 1-2, 2002, Pages 207-212

  Bayard, B ^a   Chatelon, J P ^a   Le Berre, M ^b   Joisten, H ^c   Rousseau, J J ^a   Barbier, ^b  

^a UNIVERSITÉ JEAN MONNET   (France)

^b INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^c CEA LETI   (France)

Author keywords

Barium hexaferrite; Rapid thermal annealing; rf Sputtering; Thick films

Indexed keywords

BARIUM COMPOUNDS; CRYSTALLIZATION; CRYSTALLOGRAPHY; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETOMETERS; MICROELECTRONICS; RAPID THERMAL ANNEALING; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; X RAY DIFFRACTION ANALYSIS;

SEMICONDUCTOR CHIPS;

THICK FILMS;

EID: 0037197304     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00888-3     Document Type: Conference Paper

References (8)