Diaphragmless pressure sensor

Sensors and Actuators, A: Physical

Volumn 113, Issue 3, 2004, Pages 350-354

  Krivorotov, N P ^a   Svinolupov, Yu G ^b   Izaak, T I ^c   Bychkov, V V ^d  

^a Research Institute of Semiconductor Devices   (Russian Federation)

^b OKB Division   (Russian Federation)

^c TOMSK STATE UNIVERSITY   (Russian Federation)

^d NATIONAL RESEARCH TOMSK POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

Multiplicative microelectronic pressure sensor; Pressure sensor; Semiconductor sensor

Indexed keywords

ANISOTROPY; DIAPHRAGMS; ELASTIC MODULI; ETCHING; LITHOGRAPHY; SILICON; SILICON WAFERS; SUBSTRATES;

MULTIPLICATIVE MICROELECTRONIC PRESSURE SENSOR; PRESSURE SENSORS; SEMICONDUCTOR SENSOR; SENSOR SENSITIVITY;

SENSORS;

EID: 3242683210     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.073     Document Type: Article

References (6)

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