Application of Micro Field Emitters to a Miniature Electron Beam Column

Shinku/Journal of the Vacuum Society of Japan

Volumn 43, Issue 2, 2000, Pages 112-118

  Endo, Yasuhiro ^a   Honjo, Ichiro ^a   Ito, Akio ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3242668611     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.43.112     Document Type: Article

References (8)

1. C. A. Spindt, I. Brodie, L. Humphrey and E. R. Westerberg: J. Appl. Phys., 47 (1976) 5248.
2. S. Ito, H. Toki, F. Kataoka and K. Tamura: Proc. of International Display Workshops '98, 1998 (1998) 581.
3. H. Makishima et al: Technical Digest of International Vacuum Microelectronics Conference '97 (1997) 194.
4. K. Betsui et al: Technical Digest of International Vacuum Microelectronics Conference '91 (1991) 26.
5. H. Todokoro, N. Saitou and S. Yamamoto: Jpn. J. Appl. Phys., 21 (1982) 1513.
6. Y. Endo, I. Honjo and S. Goto: J. Vac. Sci. Technol., B16 (1998) 3082.
7. R. Johnston and A. J. Miller: Surf. Sci., 266 (1992) 155.
8. I. Honjo, Y. Endo and S. Goto: J. Vac. Sci. Tcchnol., B15 (1997) 2742.