Microelectron gun with silicon field emitter

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3082-3085

  Endo, Yasuhiro ^a   Honjo, Ichiro ^a   Goto, Shunji ^a,b  

^a FUJITSU LABORATORIES LTD   (Japan)

^b JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343757802     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590495     Document Type: Article

References (3)

1. K. Betsui, Tech. Dig. 4th International Vacuum Microelectronics Conference, Nagahama, Japan, 26 (1991).
2. H. Todokoro, N. Saitou, and S. Yamamoto, Jpn. J. Appl. Phys., Part 1 21, 1513 (1982).
3. I. Honjo et al., J. Vac. Sci. Technol. B 15, 2742 (1997).