Fabrication of soft X-ray phase condenser zone plates

Guangxue Xuebao/Acta Optica Sinica

Volumn 25, Issue 12, 2005, Pages 1722-1723

  Xiao, Kai ^a   Liu, Ying ^a   Xu, Xiangdong ^a   Fu, Shaojun ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Ge; Ion beam etching; Ni; Phase zone plate; Synchrotron radiation lithography; X ray optics

Indexed keywords

CONCENTRATION (PROCESS); DISPERSION (WAVES); ETCHING; GERMANIUM; GOLD; IMAGING TECHNIQUES; ION BEAMS; LITHOGRAPHY; NICKEL;

AU CONDENSER; GE CONDENSER; NI CONDENSER; PHASE ZONE PLATE; SOFT X-RAY ZONE PLATE;

X RAY OPTICS;

EID: 32344442568     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. Gerd Schneider. X-ray microscopes: methods and perspectives [J]. Analytical and Bioanalytical Chemistry, 2003, 376: 558-561
2. Zhang Yuxuan, Jiang Shiping, Fu Shaojun et al.. In-line soft X-ray holographic image and digital reconstruction at 'Water Window' wavelength region[J]. Acta Optica Sinica, 1997, 17(11): 1599-1600 (in Chinese)
3. Zhang Yuxuan, Jiang Shiping, Fu Shaojun et al.. Soft X-ray in-line holographic microscopy and numerical reconstruction [J]. Acta Optica Sinica, 1997, 19(2): 145-150 (in Chinese)
4. Fu Shaojun, Hong Yilin, Tao Xiaoming et al.. Fabrication of soft X-ray condenser zone plate[J]. Acta Optica Sinica, 1995, 15(8): 1148-1150 (in Chinese)
5. Janos Kirz. Phase zone plate for X-rays and the extreme uv[J]. J. Opt. Sac. Am. (A), 1974, 64(3): 301-309