New developments in spectroscopic ellipsometry for nano sciences

2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Volumn , Issue , 2005, Pages 698-702

  Piel, J P ^a   Darragon, A ^a   Defranoux, C ^a  

^a SOPRA   (France)

Author keywords

Imaging Ellipsometry; Infra Red Ellipsometry; Spectroscopic Ellipsometry

Indexed keywords

ELLIPSOMETRY; LIGHT REFLECTION; SENSITIVITY ANALYSIS; SPECTROSCOPIC ANALYSIS; SUSTAINABLE DEVELOPMENT;

IMAGING ELLIPSOMETRY; INFRARED-ELLIPSOMETRY; REFERENCE BEAMS; SPECTROSCOPIC ELLIPSOMETRY;

NANOTECHNOLOGY;

EID: 32144464229     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. F. Ferrieu, F. Bernoux, J.L. Stehle, Le Vide les couches Minces, suppl. 233, 17 (1986).
2. D. Zahorski, J.L. Mariani, L. Escadafals, J. Gilles, Thin Solid Films, 234, 412-415 (1997)
3. P. Boher, J.P.Piel, C.Defranoux, J.L.Stehle, L.Hennet, SPIE's 1996 International Symposium on Microlithography, Santa Clara, March 10-15 (1996)
4. C. Pickering, W. Leong, J. Glasper, P. Boher, J.Piel, EMRS Spring meeting, Strasbourg (2001)
5. P. Boher, M. Bucchia, J.P. Piel, C. Defranoux, J.L. Stehle, C. Pickering, SPIE Conference, 29 july-3 august, vol. 444 (2001)
6. Y.H. Kim, S.K. Lee, H.J.Kim, J. Vac. Sci. Technol., A18, 4, 1216 (2000)
7. Piwonka-Corle, et al. «Focused beam spectroscopic ellipsometry method and system", US patent no5608526, March 1999