Characterisation of sol-gel thin films by spectroscopic ellipsometry

Journal of Physics: Conference Series

Volumn 28, Issue 1, 2006, Pages 95-99

  Xie, H ^a   Wei, J ^a   Zhang, X ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 32144444553     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/28/1/020     Document Type: Article

References (5)

1. C Jeffrey Brinker, George W Scherer 1990 Sol-gel Science (London: Acedemic Press) p 868
2. Taylor D J, P F Fleig and S L Hietala 1998 Thin Solid Films 332 257
3. Harland G Tompkins 1993 A User's Guide to Ellipsometry (London: Acedemic Press) p 97
4. Russell J Gehry, George L Fischer and Robert W Boyd 1997 J. Opt. Soc. Am. B 14 No 9 2310
5. Co Inc. Woollam J A 1999 Guide to Using WVASE32 159