Direct etch method for microfludic channel and nanoheight post-fabrication by picoliter droplets

Applied Physics Letters

Volumn 88, Issue 5, 2006, Pages 1-3

  Demirci, Utkan ^a   Toner, Mehmet ^a  

^a MASSACHUSETTS GENERAL HOSPITAL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROFABRICATION; MICROFLUDIC CHANNEL; NANOHEIGHT POST-FABRICATION; PICOLITER DROPLETS;

CHANNEL FLOW; FLUID MECHANICS; MICROELECTROMECHANICAL DEVICES;

PHOTOLITHOGRAPHY;

EID: 31944450676     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2170143     Document Type: Article

References (15)

1. A. V. Lemmo, D. J. Rose, and T. C. Tisone, Curr. Opin. Biotechnol. 9, 615 (1998).
2. U. Demirci and A. Ozcan, Electron. Lett. 41, 1219 (2005).
3. U. Demirci, G. Yaralioglu, E. Hæggström, G. Percin, S. Ergun, and B. T. Khuri-Yakub, IEEE Trans. Semicond. Manuf. 17, 517 (2004).
4. G. Percin, Rev. Sci. Instrum. 74, 1120 (2003).
5. U. Demirci, G. Yaralioglu, E. Hæggström, and B. T. Khuri-Yakub, IEEE Trans. Semicond. Manuf. 18, 709 (2005).
6. U. Demirci, Rev. Sci. Instrum. 76, 065103 (2005).
7. N. Maehara, S. Ueha, and E. Mori, Rev. Sci. Instrum. 57, 2870 (1986).
8. U. Demirci and M. Toner (unpublished).
9. W. Reisner, K. J. Morton, R. Riehn, Y. M. Wang, Z. Yu, M. Rosen, J. C. Sturm, S. Y. Chou, E. Frey, and R. H. Austin, Phys. Rev. Lett. 94 (2005).
10. P. J. A. Kenis, R. F. Ismagilov, and G. M. Whitesides, Science 285, 83 (1999).
11. B. Chu and R. E. Apfel, J. Acoust. Soc. Am. 72, 1673 (1982).
12. J. L. Hunter, Acoustics (Prentice Hall, Englewood Cliffs, NJ, 1957).
13. U. Demirci, IEEE Journal of Microelectromechanical Systems (in press).
14. A. W. Leissa, Scientific and Technical Information Division, Office of technology Utilization, NASA, 1-10G, 1969.
15. C. H. R. Mundo, M. Sommerfeld, and C. Tropea, Int. J. Multiphase Flow 21, 151 (1995).