Fabrication of silicon-on-diamond substrates

Proceedings - Electrochemical Society

Volumn PV 2005-02, Issue , 2005, Pages 439-449

  Feygelson, T I ^a   Hobart, K D ^b   Ancona, M ^b   Kub, F J ^b   Butler, J E ^b  

^a SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND THIN FILMS; POLYCRYSTALLINE FILMS; WAFER BONDING;

CHEMICAL VAPOR DEPOSITION; MICROELECTRONICS; MOSFET DEVICES; NANOSTRUCTURED MATERIALS; SEMICONDUCTING DIAMONDS; SURFACE ROUGHNESS; THERMAL CONDUCTIVITY; THIN FILMS;

SILICON;

EID: 31844455027     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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