Two and Three-dimensional photonic crystals of titanium dioxide and optical properties

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5931, Issue , 2005, Pages 1-8

  Awazu, Koichi ^a   Wang, Xiaomin ^a   Fujimaki, Makoto ^a   Imai, Hiroaki ^b   Kuriyama, Taketo ^c   Ohki, Yoshimichi ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b KEIO UNIVERSITY   (Japan)

^c WASEDA UNIVERSITY   (Japan)

Author keywords

Deep x ray lithography; Photonic crystal; Three dimensional fabrication; Titanium dioxide

Indexed keywords

LITHOGRAPHY; OPTICAL PROPERTIES; PHOTONS; THERMAL EXPANSION; TITANIUM DIOXIDE;

DEEP X-RAY LITHOGRAPHY; PHOTONIC CRYSTALS; THREE DIMENSIONAL FABRICATION;

CRYSTALS;

EID: 31744439908     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.617647     Document Type: Conference Paper

References (10)

1. E. Yablonovitch and T. J. Gmitter, "Photonic band structure: The face-centered-cubic case employing nonspherical atoms", Phys. Rev. Lett., 67, 2295 (1991).
2. C. Cuisin, A. Chelnokov, J.-M. Lourtioz, D. Decanini, Y. Chen, "Fabrication of three-dimensional photonic structures with submicrometer resolution by x-ray lithography", J. Vac. Sci. Technol., B18, 3505 (2000).
3. 2 thin films prepared by aqueous sol-gel process at low temperature", Thin Solid Films, 405, 50 (2002).
4. T. C. Lu, L. B. Lin, S. Y. Wu, J. Chen, Y. Y. Zhang, "Influence of neutron irradiation and its post-annealing on optical absorption of rutile", Nucl. Instrum. Methods, B191, 236 (2002).
5. S. Yamasaki, N. Hata, T. Yoshida, H. Oheda, A. Matsuda, H. Okushi, K. Tanaka, "Annealing studies on low optical absorption of GD a-Si:H using photo-acoustic spectroscopy", J. Phys., 42, C4-297 (1981).
6. E. W. Beecker, W. Ehrfeld, P. Hagmann, A. Maner and D. Münchmeyer, "Fabrication of Microstructures with high aspect ratios and great structural heights by synchrotron Radiation Lithography, Galvanoforming, and Plastic Molding (LIGA Process)", Microelectron., Eng., 4, 35 (1986).
7. R. K. Kupka, F. Bouamrane, C. Cremers and S. Megtert, Appl. Surf. Sci., 164, 97 (2000).
8. 2 Periodic Microstructures",Chem. Lett., 31, 714 (2002).
9. J. D. Joannopoulos, R. D. Meade, and J. N. Winn, "Photonic Crystals: Molding the Flow of Light" (Princeton, New Jersey: 1995).
10. Steven G. Johnson and J. D. Joannopoulos, "Block-iterative frequency-domain methods for Maxwell's equations in a plane-wave basis," Optics Express 8, no. 3, 173-190 (2001), http.//www.opticsexpress. org/abstract. cfm?URI = OPEX-8-3-173.