Control of radio-frequency atmospheric pressure argon plasma characteristics by helium gas mixing

Physics of Plasmas

Volumn 13, Issue 1, 2006, Pages 1-4

  Moon, Se Youn ^a   Han, Jewoo ^a,b   Choe, W ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE PLASMA; GAS TEMPERATURE; OPTICAL EMISSION SPECTROSCOPY; POWER COUPLING EFFICIENCY;

ARGON; ATMOSPHERIC PRESSURE; ELECTRIC BREAKDOWN; EMISSION SPECTROSCOPY; FLOW INTERACTIONS; HELIUM;

PLASMA APPLICATIONS;

EID: 31644446718     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2161173     Document Type: Article

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