Etch damage and deposition repair of vertical-cavity surface-emitting lasers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 104-107

  Leisher, Paul O ^a   Raftery, James J ^a   Kasten, Ansas M ^a   Choquette, Kent D ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC LAYERS; ETCH DAMAGE; ETCH MASKS; LASER FACET;

COMPUTER SIMULATION; LASERS; OSCILLATIONS; REACTIVE ION ETCHING; SPUTTERING;

DIELECTRIC MATERIALS;

EID: 31544462119     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2150222     Document Type: Article

References (8)

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