Design, fabrication and testing of a micromachined thermo-optical light modulator based on a vanadium dioxide array

Journal of Micromechanics and Microengineering

Volumn 14, Issue 7, 2004, Pages 833-840

  Jiang, Lijun ^a   Carr, William N ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; DEPOSITION; EVAPORATION; FABRICATION; GLASS; HYSTERESIS; LIGHT MODULATORS; OPTICAL PROPERTIES; OXIDATION; PHASE TRANSITIONS; REFLECTION; SEMICONDUCTOR DEVICES; SUBSTRATES; SWITCHING; THIN FILMS; VANADIUM COMPOUNDS;

OPTICAL SIMULATIONS; SURFACE MICROMACHINING; THERMO-OPTICAL LIGHT MODULATOR; THERMO-OPTICAL SWITCHING;

MICROMACHINING;

EID: 3142761444     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/001     Document Type: Article

References (19)

1. Senturia S D 2001 Microsystem Design (Dordrecht: Kluwer)
2. Morin F J 1959 Oxides which show metal-to-insulator transition at the Neel temperature Phys. Rev. Lett. 334-6
3. 2 thin films J. Appl. Phys. 66 5844-50
4. 2 films Thin Solid Films 402 226-31
5. Jerominek H, Picard F and Vincent D 1993 Vanadium oxide films for optical switching and detection Opt. Eng. 32 2092
6. Coath J A and Richardson M A 1998 An infrared reflective optical modulator Proc. SPIE 3292 116-20
7. [7 ] Richardson M A and Coath J A 1998 Infrared optical modulators for missile testing J. Opt. Laser Tech. 30 137-40
8. Billingsley J D 1985 Dynamic Infrared Scene Projector US Patent Specification 4530010
9. Blodgett D W, Lange C H and McNally P J 1993 Vanadium-dioxide-based infrared spatial light modulators Proc. SPIE 1969 349-56
10. Eriksson P, Andersson J Y and Stemme G 1997 Thermal characterization of surface-micromachined silicon nitride membranes for thermal infrared detectors IEEE J. MEMS 6 55-61
11. Macleod H A 2001 Thin-Film Optical Filters (Bristol: Institute of Physics Publishing)
12. Thin Film Center Inc., 2745 E Via Rotonda, Tucson, AZ 85716, USA
13. 2 between 0.25 and 5 eV Phys. Rev. 172 788-98
14. Chain E E 1987 Effects of oxygen in ion-beam sputter deposition of vanadium oxide J. Vac. Sci. Technol. A 5 1836-9
15. 2 films due to improved stoichiometry Thin Solid Films 147 111-6
16. Maruyama T and Ikuta Y 1993 Vanadium dioxide thin films prepared by chemical vapor deposition from vanadium (III) acetylacetonate J. Mat. Sci. 28 5073-8
17. 2 films grown by metal-organic chemical-vapor deposition Phys. Rev. B 47 12900-7
18. Yin D, Xu N, Zhang J and Zheng X 1996 Vanadium dioxide films with good electrical switching property J. Phys. D: Appl. Phys. 29 1051-7
19. Jiang L and Carr W N 2003 Vanadium dioxide thin films for thermo-optical switching presented 2003 MRS Fall Meeting (Boston)