Analytical heat-transfer modeling of multilayered microdevices

Journal of Micromechanics and Microengineering

Volumn 14, Issue 7, 2004, Pages 914-926

  Hao, Qing ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICITY; HEAT CONDUCTION; HEAT RESISTANCE; HEATING EQUIPMENT; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; PHASE INTERFACES; SILICA; THIN FILMS;

MICRODEVICES; MULTI-HEATERS; POLYMERASE CHAIN REACTIONS (PCR); THIN-FILM HEATERS;

HEAT TRANSFER;

EID: 3142748161     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/011     Document Type: Article

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