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Volumn 40, Issue 14, 2004, Pages 865-866
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Low-loss InGaAsP/InP submicron optical waveguides fabricated by ICP etching
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Author keywords
[No Author keywords available]
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Indexed keywords
ETCHING TIME;
OPTICAL COMPONENTS;
SUBMICRON WAVEGUIDES;
BIT ERROR RATE;
CRYSTALS;
DEPOSITION;
ETCHING;
LIGHT PROPAGATION;
LIGHT TRANSMISSION;
SEMICONDUCTING INDIUM PHOSPHIDE;
OPTICAL WAVEGUIDES;
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EID: 3142666077
PISSN: 00135194
EISSN: None
Source Type: Journal
DOI: 10.1049/el:20040502 Document Type: Article |
Times cited : (22)
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References (7)
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