MEMS gyroscope with double gimbal structure

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 163-166

  Maenaka, K ^a   Sawai, N ^a   Ioku, S ^a   Sugimoto, H ^b   Suzuki, H ^c   Fujita, T ^a   Takayama, Y ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b DAINICHI DENSHI CO LTD   (Japan)

^c NASDA ^*  (Japan)

Author keywords

Bars; Coils; Driver circuits; Electromagnetic forces; Gyroscopes; Hermetic seals; Magnetic fields; Micromechanical devices; Oscillators; Phase locked loops

Indexed keywords

ACTUATORS; ATMOSPHERIC PRESSURE; BANDPASS FILTERS; BARS (METAL); DIGITAL CONTROL SYSTEMS; GYROSCOPES; HERMETIC SEALS; MAGNETIC FIELDS; MAGNETISM; MICROSYSTEMS; OSCILLATORS (ELECTRONIC); PHASE LOCKED LOOPS; TRANSDUCERS;

COILS; DIGITAL CONTROL; DRIVER CIRCUIT; ELECTROMAGNETIC FORCES; MEMS GYROSCOPE; MICROMECHANICAL DEVICE; PARALLEL MAGNETIC FIELD; STABLE OPERATION;

SOLID-STATE SENSORS;

EID: 3142655847     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215278     Document Type: Conference Paper

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