Amorphous silicon shift registers for display drivers

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 981-986

  Kumar, A ^a   Sambandan, S ^a   Sakariya, K ^a   Servati, P ^a   Nathan, A ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CAPACITANCE; CARRIER MOBILITY; CMOS INTEGRATED CIRCUITS; FLAT PANEL DISPLAYS; HYDROGENATION; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SHIFT REGISTERS; SPUTTERING; STRESSES; THIN FILM TRANSISTORS; THRESHOLD VOLTAGE; TRANSCONDUCTANCE;

ELECTRICAL STRESSES; METASTABILITY; MODULATION FACTOR; THIN FILM TRANSISTORS (TFT);

AMORPHOUS SILICON;

EID: 3142649825     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1722376     Document Type: Conference Paper

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