Si-compatible ion selective oxide interconnects with high tunability

Advanced Materials

Volumn 16, Issue 11, 2004, Pages 900-904

  Schmuhl, Riaan ^a   Sekulic, Jelena ^a   Chowdhury, Sankhanilay Roy ^a   Van Rijn, Cees J M ^b   Keizer, Klaas ^a   Van Den Berg, Albert ^a   Ten Elshof, E ^a   Blank, Dave H A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b AQUAMARIJN MICRO FILTRATION B V   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; BIOTECHNOLOGY; CONCENTRATION (PROCESS); DEMODULATION; ETCHING; MESOPOROUS MATERIALS; MICROPOROUS MATERIALS; NANOFILTRATION; POLYSTYRENES; SCANNING ELECTRON MICROSCOPY; SOLUTIONS; THIN FILMS;

BIOMOLECULES; INTERCONNECTS; ION SELECTIVE OXIDE; TUNABILITY;

NANOSTRUCTURED MATERIALS;

EID: 3142626691     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200306660     Document Type: Article

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