Metalorganic vapor phase diffusion using DMZn Part II: Determination of the interstitial zinc charge state from secondary ion mass spectroscopy measurements using the Boltzmann-Matano technique

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 916-920

  Hampel, C A ^a   Blaauw, C ^b   Haysom, J E ^a   Glew, R ^a   Calder, I D ^a   Guillon, S ^a   Bryskiewicz, T ^a   Puetz, N ^a  

^a Bookham Technology   (Canada)

^b NORTEL NETWORKS   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITANCE; COMPLEXATION; CONCENTRATION (PROCESS); DIFFUSION; EPITAXIAL GROWTH; FERMI LEVEL; MATHEMATICAL MODELS; NUMERICAL METHODS; PASSIVATION; SECONDARY ION MASS SPECTROMETRY; SUBSTITUTION REACTIONS; ZINC;

ELECTROCHEMICAL CAPACITANCE; METALORGANIC VAPOR PHASE DIFFUSION; THERMAL ANNEALING; VACANCY COMPLEXES;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 3142605711     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1640392     Document Type: Conference Paper

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