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Volumn 17, Issue 4, 2004, Pages 651-653
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Polymers based on a novel 1,3-perfluorodioxole for use as a soft polymer pellicle in 157nm lithography
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Author keywords
157 nm lithography; Perflurodioxole; Polymer pellicle
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Indexed keywords
1,3 DIOXOLANE DERIVATIVE;
1,3 PERFLUORODIOXOLE;
4 TRIFLUOROMETHOXY 1,3 PERFLUORODIOXOLE;
CARBONYL DERIVATIVE;
COPOLYMER;
FREE RADICAL;
PERFLUORO COMPOUND;
PEROXIDE;
POLYMER;
TETRAFLUOROETHYLENE;
UNCLASSIFIED DRUG;
ARTICLE;
CHEMICAL ANALYSIS;
CHEMICAL REACTION;
CONCENTRATION RESPONSE;
DIFFERENTIAL SCANNING CALORIMETRY;
FLUORINATION;
LITHOGRAPHY;
MEASUREMENT;
NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY;
PARAMETER;
POLYMERIZATION;
REACTION ANALYSIS;
SYNTHESIS;
TECHNIQUE;
THERMOGRAVIMETRY;
ULTRAVIOLET RADIATION;
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EID: 3142581441
PISSN: 09149244
EISSN: None
Source Type: Journal
DOI: 10.2494/photopolymer.17.651 Document Type: Article |
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Times cited : (1)
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References (4)
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