Light coupling into an optical microcantilever by an embedded diffraction grating

Applied Optics

Volumn 45, Issue 2, 2006, Pages 229-234

  Zinoviev, K ^a   Dominguez, C ^a   Plaza, J A ^a   Cadarso, V ^a   Lechuga, L M ^b  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; DIFFRACTION GRATINGS; LIGHT SCATTERING; VIBRATIONS (MECHANICAL);

CANTILEVER DEFLECTION; EXCITATION EFFICIENCY; LIGHT COUPLING; SPATIAL ORIENTATION;

OPTICAL SYSTEMS;

EID: 31344473736     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.000229     Document Type: Article

References (18)

1. R. McKendry, J. Zhang, Y. Arntz, T. Strunz, M. Hegner, H. P. Lang, M. K. Baller, U. Certa, E. Meyer, H.-J. Güntherodt, and C. Gerber, "Multiple label free biodetection and quantitative DNA-binding assays on a nanomechanical cantilever array," Proc. Natl. Acad. Sci. USA 99, 9783-9788 (2002).
2. J. Thaysen, A. Boisen, O. Hansen, and S. Bouwstra, "Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement," Sens. Actuators B 83, 47-53 (2000).
3. R. Budakian and S. J. Putterman, "Force detection using a fiber-optic cantilever," Appl. Phys. Lett. 81, 2100-2102 (2002).
4. R. Petit, Electromagnetic Theory of Gratings (Springer-Verlag, 1980).
5. K. Ogawa, W. S. C. Chang, B. L. Sopori, and F. J. Rosenbaum, "A theoretical analysis of etched grating couplers for integrated optics," IEEE J. Quantum Electron. QE-9, 29-42 (1973).
6. S. T. Peng and T. Tamir, "Theory of periodic dielectric waveguides," IEEE Trans. Microwave Theory Tech. MTT-23, 123-133 (1975).
7. M. T. Wlodarczyk and S. R. Seshadri, "Analysis of grating couplers for planar dielectric waveguides," J. Appl. Phys. 58, 69-87 (1985).
8. O. Parriaux, V. A. Sychugov, and A. V. Tishchenko, "Coupling gratings as waveguide functional element," Pure Appl. Opt. 5, 453-469 (1996).
9. J. C. Brazas and L. Li, "Analysis of input grating couplers having finite lengths," Appl. Opt. 34, 3786-3792 (1995).
10. L. Li and M. C. Gupta, "Effects of beam focusing on the efficiency of planar grating couplers," Appl. Opt. 29, 5320-5325 (1990).
11. R. Orobtchouk, A. Layadi, H. Gualous, D. Pascal, A. Koster, and S. Laval, "High-efficiency light coupling in a submicrometric silicon-on-insulator waveguide," Appl. Opt. 39, 5773-5777 (2000).
12. S. Ura, T. Fujii, T. Suhara, and H. Nishihara, "Efficiency-enhanced third-order grating coupler," Appl. Opt. 38, 3003-3007 (1999).
13. B. N. Zvonkov, K. E. Zinoviev, D. Kh. Nurligareev, I. F. Salakhutdinov, V. V. Svetikov, and V. A. Sychugov, "Tunable wide-aperture semiconductor laser with an external waveguide-grating mirror," Quantum Electron. 31, 35-38 (2001).
14. N. Ericsson, M. Hagberg, and A. Larsson, "Highly directional grating outcouplers with tailorable radiation characteristics," IEEE J. Quantum Electron. 32, 1038-1047 (1996).
15. W. Streifer, R. D. Burnham, and D. R. Scifres, "Analysis of grating coupled radiation in GaAs:GaAlAs lasers and waveguides," IEEE J. Quantum Electron. QE-12, 422-428 (1976).
16. N. Destouches, A. V. Tishchenko, J. C. Pommier, S. Reynaud, O. Parriaux, S. Tonchev, and M. Abdou Ahmed, "99% efficiency measured in the -1st order of a resonant grating," Opt. Express 13, 3230-3235 (2005).
17. D. Sarid, Scanning Force Microscopy with Applications to Electric, Magnetic and Atomic Forces (Oxford U. Press, 1994).
18. E. Anemogiannis and E. N. Glytsis, "Multilayer waveguides: efficient numerical analysis of general structures," J. Light-wave Technol. 10, 1344-1351 (1992).