Surface morphology of epitaxial LiF(110) and CaF2 (110) layers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 2, 2005, Pages 443-448

  Sugawara, Akira ^a,b   Mae, K ^a,c  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^b HITACHI LTD   (Japan)

^c Humming Heads Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALCIUM COMPOUNDS; DEPOSITION; EPITAXIAL GROWTH; MORPHOLOGY; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SURFACE STRUCTURE;

ADMOLECULES; GROOVES; HOMOEPITAXIAL GROWTH; RIDGE SPACINGS;

LITHIUM COMPOUNDS;

EID: 31344447535     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1865116     Document Type: Conference Paper

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