Molecular transition and slip flows in the pumping channels of drag pumps

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 3, 2000, Pages 1025-1034

  Heo, Joong Sik ^a   Hwang, Young Kyu ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CHANNEL FLOW; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; MONTE CARLO METHODS; NAVIER STOKES EQUATIONS; NUMERICAL ANALYSIS; RANDOM PROCESSES; TRANSITION FLOW;

CONTINUUM METHOD; DISK-TYPE DRAG PUMPS (DTDP); HELICAL-TYPE DRAG PUMPS (HTDP); KNUDSEN NUMBER; MOLECULAR TRANSITION; SLIP FLOW; STOCHASTIC PARTICLE METHOD; TURBOMOLECULAR PUMPS (TMP);

VACUUM PUMPS;

EID: 0034187704     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582294     Document Type: Article

References (19)

1. M. H. Hablanian, High-Vacuum Technology (Marcel Dekker, New York, 1990).
2. M. H. Hablanian, Vacuum Science and Technology: Pioneers of 20th Century (AIP, New York, 1994).
3. K. Nanbu, H. Kubota, S. Igarashi, C. Urano, and H. Enosawa, Trans. Jpn. Soc. Mech. Eng. B 57, 172 (1991).
4. T. Sawada, Sci. Pap. Inst. Phys. Chem. Res. (Jpn.) 70, 79 (1976).
5. T. Sawada, Bull. JSME 22, 974 (1979).
6. T. Sawada, Vacuum 44, 689 (1993).
7. T. Sawada and M. Nakamura, Bull. JSME 29, 1770 (1986).
8. T. Sawada and M. Nakamura, Vacuum 41, 1833 (1990).
9. C. N. Panos, A. G. Antoniou, and S. E. Valamontes, Vacuum 45, 841 (1994).
10. J. G. Chu, J. Vac. Sci. Technol. A 6, 1202 (1988).
11. N. Liu and S. Pang, Vacuum 41, 2015 (1990).
12. L. Shi, X. Wang, Y. Zhu, and S. Pang, J. Vac. Sci. Technol. A 11, 426 (1993).
13. L. Shi, Y. Zhu, X. Wang, and S. Pang, J. Vac. Sci. Technol. A 11, 704 (1993).
14. G. A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows (Clarendon, Oxford, 1994).
15. K. Koura, Phys. Fluids 29, 3509 (1986).
16. K. Koura and H. Matsumoto, Phys. Fluids 4, 1083 (1992).
17. J. B. Marion and S. T. Thornton, Classical Dynamics of Particles and Systems (Saunders, Philadelpna, 1995).
18. T. Kanki, Proceedings of the 19th International Symposium Rarefied Gas Dynamics (1994), p. 375.
19. B. Lakshminarayana, Fluid Dynamics and Heat Transfer of Turbomachinery (Wiley, New York, 1996).