Effect of Ti interlayer on the growth of carbon nanotubes on Si by microwave-heated chemical vapor deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 2, 2005, Pages 805-808

  Huang, J H ^a   Chen, Y S ^a   Chuang, C C ^a   Wong, Y M ^b   Kang, W P ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERLAYERS; THIN CATALYST LAYERS;

CATALYSTS; DEPOSITION; HEATING; MICROWAVES;

CARBON NANOTUBES;

EID: 31144469415     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1861032     Document Type: Conference Paper

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