Low-energy sputtering yields of tungsten and tantalum

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 6, 2005, Pages 1545-1547

  Doerner, R P ^a  

^a UNIVERSITY OF CALIFORNIA SAN DIEGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LOW-ENERGY SPUTTERING; PLASMA ENVIRONMENT;

ION BOMBARDMENT; MOLYBDENUM; PLASMA APPLICATIONS; SPUTTERING; TANTALUM;

TUNGSTEN;

EID: 31144437376     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2110385     Document Type: Article

References (6)

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2. K. Krieger, J. Nucl. Mater. 337-339, 10 (2005).
3. H. P. Summers and M. G. O'Mullane, " The Atomic Data and Analysis Structure., " in Nuclear Fusion Research, Understanding Plasma-Surface Interactions, edited by, R. E. H. Clark, and, D. H. Reiter, (Springer, Berlin, 2005).
4. C. Kittel, Introduction to Solid State Physics (Wiley, New York, 1976).
5. A. Geier, Rev. Sci. Instrum. 70, 63 (1999).
6. M. G. O'Mullane (private communication).