Introduction to Surface Science Spectra data on electron and x-ray damage: Sample degradation during XPS and AES measurements

Surface Science Spectra

Volumn 10, Issue 1, 2003, Pages 47-56

  Baer, D R ^a   Engelhard, M H ^a   Lea, A S ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMAGE DETECTION; ELECTRON IRRADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

AUGER-ELECTRON SPECTROSCOPY; DAMAGE FORMATION; SAMPLE SURFACE; SIMPLE METHOD; SPECTRA DATUM; SPECTROSCOPY MEASUREMENTS; SURFACE SCIENCE; THIN-FILMS; X-RAY DAMAGE; X-RAY PHOTOELECTRONS;

AUGER ELECTRON SPECTROSCOPY;

EID: 31044456710     PISSN: 10555269     EISSN: 15208575     Source Type: Journal    
DOI: 10.1116/11.20040199     Document Type: Article

References (33)

1. J. H.Thomas, in Beam Effects, Surface Topography and Depth Profiling in Surface Analysis, edited by A. W.Czanderna, T. E.Madey, and C. J.Powell (Plenum, New York, 1998), p. 1.
2. D. A.Cleary and D. R.Baer, Chem. Mater. 4, 112 (1992). 10.1021/cm00019a024
3. P. C.Rieke, D. R.Baer, G. E.Fryxell, M. H.Engelhard, and M. S.Porter, J. Vac. Sci. Technol. A 11, 2292 (1993). 10.1116/1.578364
4. D. R.Baer and M. T.Thomas, Appl. Surf. Sci. 26, 150 (1986). 10.1016/0169-4332(86)90002-4
5. L.-Q.Wang, D. R.Baer, and M. H.Engelhard, Surf. Sci. 320, 295 (1994). 10.1016/0039-6028(94)90317-4
6. D. R.Baer, P.Xiong-Skiba, A. N.Shultz, L.-Q.Wang, and M. H.Engelhard, Surf. Sci. Spectra 5, 193 (1998). 10.1116/1.1247839
7. N.Petrik, K.Knutsen, E.Paparazzo, A. S.Lea, D. M.Camaioni, and T. M.Orlando, J. Phys. Chem. B 104, 1563 (2000). 10.1021/jp993310g
8. D. R.Baer, D. J.Gaspar, M. H.Engelhard, and A. S.Lea, in Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, edited by D.Briggs and J.Grant, 2003, Chap 9 (http://www.surfacespectra.com/books/electronspec/).
9. D. R.Baer, M. H.Engelhard, A. S.Lea, and D. J.Gaspar, Appendix F of Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, edited by D.Briggs and J.Grant, 2003.
10. C. G.Pantano, A. S.D’Souza, and A. M.Then, in Beam Effects, Surface Topography and Depth Profiling in Surface Analysis, edited by A. W.Czanderna, T. E.Madey, and C. J.Powell (Plenum, New York, 1998), p. 39.
11. V. S.Smentkowski, Prog. Surf. Sci. 64, 1 (2000). 10.1016/S0079-6816(99)00021-0
12. S.Hofmann, Rep. Prog. Phys. 61, 827 (1998). 10.1088/0034-4885/61/7/002
13. L. S.Dake, D. E.King, J. R.Pitts, and A. W.Czanderna, in Beam Effects, Surface Topography and Depth Profiling in Surface Analysis, edited by A. W.Czanderna, T. E.Madey, and C. J.Powell (Plenum, New York, 1998), p. 97.
14. J. T.Dickinson, S. C.Langford, L. C.Jensen, P. A.Eschbach, L. R.Pederson, and D. R.Baer, J. Appl. Phys. 68, 1831 (1990). 10.1063/1.346618
15. L.-Q.Wang, D. R.Baer, and M. H.Engelhard, Surf. Sci. 320, 295 (1994). 10.1016/0039-6028(94)90317-4
16. M.Eglin, A.Rossi, E. M.Piras, and N. D.Spencer, Surf. Sci. Spectra 8, 97 (2001). 10.1116/11.20010901
17. N. H.Turner, J. S.Murday, and D. E.Ramaker, Anal. Chem. 52, 84 (1980). 10.1021/ac50051a021
18. J.Cazaux, J. Electron Spectrosc. Relat. Phenom. 105, 155 (1999). 10.1016/S0368-2048(99)00068-7
19. J.Cazaux, J. Electron Spectrosc. Relat. Phenom. 113, 15 (2000). 10.1016/S0368-2048(00)00190-0
20. M. L.Knotek and P. J.Feibelman, Phys. Rev. Lett. 40, 964 (1978). 10.1103/PhysRevLett.40.964
21. M. L.Knotek and P. J.Feibelman, Surf. Sci. 90, 78 (1979). 10.1016/0039-6028(79)90011-6
22. G.Beamson and D.Briggs, High Resolution XPS of Organic Polymers: The Scienta ESCA300 Database (Wiley, Chichester, UK, 1992).
23. V.Crist, XPS-International Data Tables, 754 Leona Lane, Mountain View, CA 94040.
24. B. D.Ratner and D. G.Castner, Colloids Surf., B 2, 333 (1994). 10.1016/0927-7765(94)80048-0
25. K.Yoshihara and A.Tanaka, Surf. Interface Anal. 33, 252 (2002). 10.1002/sia.1208
26. P. C.Rieke, D. R.Baer, G. E.Fryxell, M. H.Engelhard, and M. S.Porter, J. Vac. Sci. Technol. A 11, 2292 (1993). 10.1116/1.578364
27. P. E.Laibinis, R. L.Graham, H. A.Biebuyck, and G. M.Whitesides, Science 254, 981 (1991). 10.1126/science.254.5034.981
28. C. G.Pantano and T. E.Madey, Appl. Surf. Sci. 7, 115 (1981). 10.1016/0378-5963(81)90065-9
29. A.S.Lea, M. H.Engelhard, and D. R.Baer. Surf. Sci. Spectra (in press).
30. M. H.Engelhard, A.Krishna, P.Kulkarni, C. Y.Lee, and D. R.Baer, Sur. Sci. Spectra (in press).
31. M. H.Engelhard, D. R.Baer, and A. S.Lea, Sur. Sci. Spectra (in press).
32. J. E.Castle and C. J.Powell, Surf. Interface Anal. 36, 225 (2004). 10.1002/sia.1678
33. J. E. Castle, Presented at the 2003 AVS International Symposium