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Volumn 126, Issue 1, 2006, Pages 48-55

Packaging effect investigation of CMOS compatible pressure sensor using flip chip and flex circuit board technologies

Author keywords

Finite element method (FEM); Package; Piezoresistive pressure sensor

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRONICS PACKAGING; FINITE ELEMENT METHOD; MICROPROCESSOR CHIPS; PRESSURE EFFECTS; SENSITIVITY ANALYSIS; THERMAL EXPANSION;

EID: 31044449217     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.09.018     Document Type: Article
Times cited : (22)

References (10)
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    • Smith, C.S.1
  • 2
    • 34249846476 scopus 로고
    • Semiconducting stress transducers utilizing the transverse and shear piezoresistance effects
    • W.G. Pfann, and R.N. Thurston Semiconducting stress transducers utilizing the transverse and shear piezoresistance effects J. Appl. Phys. 32 1961 2008 2018
    • (1961) J. Appl. Phys. , vol.32 , pp. 2008-2018
    • Pfann, W.G.1    Thurston, R.N.2
  • 3
    • 0019916789 scopus 로고
    • A graphical representation of the piezoresistance coefficient in silicon
    • Y. Kanda A graphical representation of the piezoresistance coefficient in silicon IEEE Trans. Electron Dev. 1982 64 70 ED-29
    • (1982) IEEE Trans. Electron Dev. , pp. 64-70
    • Kanda, Y.1
  • 4
    • 0347032865 scopus 로고    scopus 로고
    • Measurement of the temperature dependency of the piezoresistance coefficients in p-type silicon
    • E. Lund, and T. Finstad Measurement of the temperature dependency of the piezoresistance coefficients in p-type silicon Adv. Electron. Pack. -ASME EEP-26-1 1999 215 218
    • (1999) Adv. Electron. Pack. -ASME , vol.EEP-26-1 , pp. 215-218
    • Lund, E.1    Finstad, T.2
  • 6
    • 0347032859 scopus 로고    scopus 로고
    • Silicon piezoresistive stress sensors using MOS and bipolar transistors
    • R.C. Jaeger, J.C. Suhling, A.T. Bradley, and J. Xu Silicon piezoresistive stress sensors using MOS and bipolar transistors Adv. Electron. Pack. -ASME EEP-26-1 1999 219 225
    • (1999) Adv. Electron. Pack. -ASME , vol.EEP-26-1 , pp. 219-225
    • Jaeger, R.C.1    Suhling, J.C.2    Bradley, A.T.3    Xu, J.4
  • 7
    • 0031177512 scopus 로고    scopus 로고
    • Optimum design considerations for silicon piezoresistive pressure sensor
    • Y. Kanda Optimum design considerations for silicon piezoresistive pressure sensor Sens. Actuators A 62 1997 539 542
    • (1997) Sens. Actuators A , vol.62 , pp. 539-542
    • Kanda, Y.1
  • 9
    • 0031141301 scopus 로고    scopus 로고
    • Simulation of thermally induced package effects with regard to piezoresistive pressure sensors
    • F. Schilling, W. Langheinrich, K. Weiblen, and D. Arand Simulation of thermally induced package effects with regard to piezoresistive pressure sensors Sens. Actuators A 60 1997 37 39
    • (1997) Sens. Actuators A , vol.60 , pp. 37-39
    • Schilling, F.1    Langheinrich, W.2    Weiblen, K.3    Arand, D.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.