High sensitive touch sensor with piezoelectric thin film for pipetting works under microscope

Sensors and Actuators, A: Physical

Volumn 126, Issue 1, 2006, Pages 1-6

  Motoo, Kohei ^a   Arai, Fumihito ^a   Fukuda, Toshio ^a   Katsuragi, Tohoru ^b   Itoigawa, Kouichi ^c  

^a NAGOYA UNIVERSITY   (Japan)

^b NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^c Tokai Rika Co Ltd   (Japan)

Author keywords

Hydrothermal method; Micromanipulation; Microorganisms; Touch sensor; Vibrating piezoelectric element

Indexed keywords

FINITE ELEMENT METHOD; MICROORGANISMS; MICROSCOPES; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS; THIN FILMS;

HYDROTHERMAL METHODS; MICROMANIPUOLATION; TOUCH SENSORS; VIBRATING PIEZOELECTRIC ELEMENTS;

SENSORS;

EID: 31044440146     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.08.030     Document Type: Article

References (15)

1. T. Katsuragi, and Y. Tani Selection of microorganisms with specific characteristics by single-cell sorting with flow or microscope-based (including laser scanning) cytometry Acta Biotechnol. 21 2001 99 115
2. M.R. Melamed, T. Lindmo, and M.L. Mendelsohn Flow Cytometry and Sorting second ed. 1991 Wiley-Liss New York, USA
3. T. Katsuragi, and Y. Tani Screening for microorganisms with specific characteristics by flow cytometory and single-cell sorting J. Biosci. Bioeng. 89 2000 217 222
4. F. Arai, A. Ichikawa, M. Ogawa, T. Fukuda, K. Horio, and K. Itoigawa High speed separation system of randomly suspended single living cells by laser trap and dielectrophoresis Electrophoresis 22 2 2001 283 288
5. F. Arai, A. Ichikawa, T. Fukuda, and T. Katsuragi Isolation and extraction of target microbes using thermal sol-gel transformation Analyst 128 2003 547 551
6. F. Arai, K. Yoshikawa, T. Sakami, and T. Fukuda Synchronized laser micromanipulation of multiple targets along each trajectory by single laser Appl. Phys. Lett. 85 2004 4301 4303
7. F. Arai, T. Sugiyama, T. Fukuda, H. Iwata, and K. Itoigawa Micro tri-axial force sensor for 3D bio-micromanipulation Proceedings of the 1999 IEEE International Conference on Robotics & Automation, vol. 4 1999 2744 2749
8. F. Arai, K. Motoo, P.G.R. Kwon, T. Fukuda, A. Ichikawa, and T. Katsuragi Novel Touch Sensor with Piezoelectric Thin Film for Microbial Separation Proceedings of the 2003 IEEE International Conference on Robotics & Automation 2003 306 311
9. F. Arai, K. Motoo, P.G.R. Kwon, T. Fukuda, A. Ichikawa, and T. Katsuragi Cylindrical micro touch sensor with a piezoelectric thin film for microbial separation Robotica 23 2005 441 448
10. K. Shimomura, T. Tsurumi, Y. Ohba, and M. Daimon Preparation of lead zirconate titanate thin film by hydrothermal method Jpn. J. Appl. Phys. 30 9B 1991 2174 2177
11. Y. Ohba, M. Miyauchi, T. Tsurumi, and M. Daimon Analysis of bending displacement of lead zirconate titanate thin film synthesized by hydrothermal method Jpn. J. Appl. Phys. 32 9B 1993 4095 4098
12. T. Kanda, M.K. Kurosawa, H. Yasui, and T. Higuchi Performance of hydrothermal PZT film on high intensity operation Sens. Actuators A 89 2001 16 21
13. L. Du, G. Kwon, F. Arai, T. Fukuda, K. Itoigawa, and Y. Tukahara Structure design of micro touch sensor array Sens. Actuators A 107 2003 7 13
14. T. Ikeda Electroacoustical constants of asymmetric piezoelectric bimorph Jpn. J. Acoust. Soc. 23 1967 300 310 (in Japanese)
15. T. Ikeda Fundamentals of Piezoelectricity 1990 Oxford University Press pp. 15-25