Analysis of uncompensated Langmuir probe characteristics in radio-frequency discharges revisited

Journal of Applied Physics

Volumn 99, Issue 1, 2006, Pages

  Oksuz, L ^a   Soberon F ^a   Ellingboe, A R ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TEMPERATURE; LANGMUIR PROBE SYSTEM.; PLASMA PARAMETERS; RADIO-FREQUENCY DISCHARGES;

COMPUTATIONAL METHODS; ELECTROSTATICS; LANGMUIR BLODGETT FILMS; MAXWELL EQUATIONS; OSCILLATIONS; PLASMA DENSITY;

PLASMA PROBES;

EID: 30844438514     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2158496     Document Type: Article

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