A new method of electron temperature determination in unmagnetized and magnetized RF plasmas without RF compensating circuit

Contributions to Plasma Physics

Volumn 44, Issue 7-8, 2004, Pages 662-667

  Choi, Y S ^a   Lee, B K ^a   Chung, K S ^a  

^a Hanyang University   (South Korea)

Author keywords

Compensation; Peak detection; Plasma; Probe; RF

Indexed keywords

CATHODE RAY OSCILLOSCOPES; LANGMUIR PROBES; MAGNETOPLASMA; PLASMA THEORY;

'CURRENT; APPLIED VOLTAGES; COMPENSATING CIRCUITS; COMPENSATION; COMPENSATION CIRCUITS; I - V CURVE; PEAK DETECTION; RF; RF PLASMA; TEMPERATURE DETERMINATION;

ELECTRON TEMPERATURE;

EID: 10844236459     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.200410098     Document Type: Article

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